Micro electromechanical system (MOEMS), which integrates micro mechanical electronic system (MEMS) and optical device, makes the optical device develop rapidly towards the direction of miniaturization. The use of micro machining technology can obtain high processing accuracy, and can make various Actuators, optical mirrors and optical waveguides are integrated with semiconductor lasers, photoelectric detection devices, etc. to form an active opto-electromechanical system, so MOEMS is a promising application field of MEMS. Compared with the early traditional optical switches, it can achieve excellent performance such as small insertion loss, short switching time and low power consumption, and the appearance is small. It can be mass-produced on a mature Ic process production line, which greatly reduces the cost.